作者：BowenZhang,ChaoYun,JudithL.MacManus-Driscoll 单位：DepartmentofMaterialsScienceandMetallurgy,UniversityofCambridge 本文刊于： 《Nano-Micro Letters》 2021年第02期
关键词:
Free-standingoxidethinfilms HighyieldtraKeywords
Free-standing oxide thin films, High yield transfer, Wet etching, Crack prevention
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摘要
In this work,we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films.The method involves fixing a PET frame onto a PMMA attachment film,enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr3Al2O6 sacrificial layer.The crystallinity,surface morphology,continuity,and purity of the films are all preserved in the transfer process.We demonstrate the applicability of our method for three different film compositions and structures of thickness～100 nm.Furthermore,we show that by using epitaxial nanocomposite films,lift-off yield is improved by ～50% compared to plain epitaxial films and we ascribe this effect to the higher fracture toughness of the composites.This work shows important steps towards large-scale perovskite thin-film-based electronic device applications.
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