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SU-8柔性微夹钳的拓扑优化设计与制作工艺

The Topology Optimized Design and Fabrication of SU-8 Compliant Microgripper

作者: 专业:微机电工程 导师:褚金奎 年度:2010 学位:硕士  院校: 大连理工大学

Keywords

Microgripper, Topology Optimization, SU-8 Photoresist, Microfabrication

        微夹钳是微机电领域一种重要的微执行器,通过夹持微小物体进行移动、组装等动作来实现微装配和微操作。由于微夹钳的重要性及其应用的日益广泛,近年来对其的研究已经成为了微纳技术研究领域的热点之一。本文以柔性微夹钳为研究对象,对其在设计方法、结构设计和制作工艺等方面进行了研究,为微夹钳的技术应用产业化奠定基础。本文从柔性机构的拓扑优化设计方法入手,论述了基于SIMP插值模型的人工密度法以及设计过程,建立了最大输出位移、最大MSE/SE和最大机械增益为目标函数的柔性机构拓扑优化设计的数学模型。在MATLAB软件环境下,通过具体算例的设计对这三种模型进行了比较和分析。将柔性机构的拓扑优化设计引入到三维结构,并对具体算例进行了设计。为了满足柔性微夹钳在位移特性上的要求,对柔性微夹钳钳体进行了拓扑优化设计。其中,以镍为设计材料,以最大输出位移为目标设计了一种钳口常闭型微夹钳,以SU-8胶为设计材料,以最大MSE/SE为目标设计了一种的钳口常开型微夹钳。目前采用连续体拓扑优化设计的柔性微夹钳以钳口常开型为主,而本文设计的常闭型微夹钳在驱动时钳口张开,依靠自身回程反力夹持物体,夹持过程中不需要提供驱动,而且对于电热驱动器而言,夹持过程中钳口也不受电热驱动的影响,有利于微操作。同时采用ANSYS软件对电热柔性微夹钳进行了有限元仿真。结合材料性能和电热微夹钳的特点,以SU-8胶为钳体材料同时采用V形梁作为电热驱动器来研究微夹钳的制作工艺。SU-8胶材料本身具有低的热传导率和高的热膨胀系数,同时具有良好的生物适应性,是电热微夹钳的理想材料。通过对微夹钳的驱动器结构形式的仿真,制定了两种制作工艺,并加工制作出高成品率和质量的微夹钳。同时进行了驱动实验,成功的驱动实验验证了柔性微夹钳设计的正确性和制作工艺的合理性。
    Microgripper is an important micro-actuator in MEMS for micro-operation and micro-assembly by handling and manipulating micro-objects. The research of microgripper has been one of the focuses in micro-and nanotechnologies for recent years because of its significant and wide application. The topology optimized design method, structure design and fabrication process of compliant microgripper are investigated in this thesis, for the purpose of settling foundation for practical application.In this thesis, the design method and design process of compliant mechanisms based on SIMP(Solid Isotropic Microstructures Penalization) artificial material density method are discussed. The mathematical formulations of topology optimization for compliant mechanisms are established, in which the maximal output displacement, the maximal MSE/SE(Mutual Strain Energy/Strain Energy) and the maximal mechanical advantage are regarded as the objective functions. Different synthesis examples are implemented in MATLAB to compare and analyze the three formulations. The topology optimized design of compliant mechanism is used in three dimension included several synthesis examples.New optimal topological structures of compliant microgripper are designed for the sake of displacement character. The open-when-driven(OWD) microgripper is designed with nickel using the objective of maximal output displacement, and the close-when-driven(CWD) one with SU-8 using objective of maximal MSE/SE. Comparing with the CWD microgripper which is the dominating structure based on continuum topology optimization currently, the jaw of the OWD microgripper designed in this thesis is open when driven and automatically clamping the targets when the drive is turned off. In addition, the jaw is immune from the electro-thermal affection while nipping the objects. The character of structure is analyzed with finite element simulation by ANSYS.SU-8 photoresist is chosen for its low thermal expansion, high thermal conductivity and biocompatibility to fabricate the V-shaped electro-thermally actuated microgripper. From the simulation result of the electro-thermal actuater, two kinds of fabrication process are constituted. The SU-8 microgrippers are fabricated with high quality and yield. Experiment is carried out finally, and the success validates the structural design and fabricating process.
        

SU-8柔性微夹钳的拓扑优化设计与制作工艺

摘要5-6
Abstract6
1 绪论9-18
    1.1 课题背景及研究意义9
    1.2 国内外研究现状9-17
        1.2.1 微夹钳的设计9-14
        1.2.2 微夹钳的制作14-17
    1.3 本文的研究内容17-18
2 柔性机构的拓扑优化设计18-39
    2.1 拓扑优化设计过程18-21
        2.1.1 基于SIMP插值模型的拓扑优化18-20
        2.1.2 设计流程20-21
    2.2 数值计算方法与常见数值问题21-24
        2.2.1 优化算法21-22
        2.2.2 常见数值问题与消除方法22-24
    2.3 目标函数模型24-29
        2.3.1 输出位移模型24-26
        2.3.2 MSE/SE模型26-28
        2.3.3 机械增益模型28-29
    2.4 设计算例与比较29-36
    2.5 三维柔性机构设计36-38
    2.6 本章小结38-39
3 柔性微夹钳的设计与有限元仿真39-51
    3.1 最大输出位移的微夹钳设计39-45
        3.1.1 微夹钳结构设计39-42
        3.1.2 有限元仿真42-45
    3.2 最大MSE/SE的微夹钳设计45-50
        3.2.1 微夹钳结构设计45-49
        3.2.2 有限元仿真49-50
    3.3 本章小结50-51
4 SU-8胶微夹钳的制作工艺51-68
    4.1 SU-8胶材料微夹钳51-52
    4.2 SU-8胶微夹钳驱动器结构研究52-56
    4.3 金属层在两面的微夹钳制作工艺56-61
        4.3.1 掩膜版设计56-57
        4.3.2 制作工艺流程57-60
        4.3.3 实验结果60-61
    4.4 金属层在中间的微夹钳制作工艺61-64
        4.4.1 制作工艺流程61-63
        4.4.2 实验结果63-64
    4.5 微夹钳驱动实验64-67
    4.6 本章小结67-68
结论68-69
参考文献69-72
附录A 掩膜版CAD图72-73
攻读硕士学位期间发表学术论文情况73-74
致谢74-76
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